Structures and resistive properties of sputtered TiZrAlN thin films
- 1 June 1972
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 10 (3) , 367-375
- https://doi.org/10.1016/0040-6090(72)90208-8
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Study of the Wurtzite-Type Binary Compounds. II. Macroscopic Theory of the Distortion and PolarizationThe Journal of Chemical Physics, 1957