Resistivity curves for subsurface diffused layers in silicon
- 28 February 1995
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 38 (2) , 367-375
- https://doi.org/10.1016/0038-1101(94)00117-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Recalculation of Irvin's resistivity curves for diffused layers in silicon using updated bulk resistivity dataSolid-State Electronics, 1993
- Resistivity‐Dopant Density Relationship for Boron‐Doped SiliconJournal of the Electrochemical Society, 1980
- Resistivity‐Dopant Density Relationship for Phosphorus‐Doped SiliconJournal of the Electrochemical Society, 1980
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962