A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 389-392
- https://doi.org/10.1109/sensor.1995.717214
Abstract
A new driving mechanism of a microactuator is reported. The actuator is composed of folded suspensions and a mass. The driving mechanism is interesting because the actuator generates large static displacement when over all structure oscillates at a higher mode resonance. Since this phenomenon (pseudo-static displacement) was observed in the actuator made of various materials, it seems to be an effect common to this shape of actuator, and can be applied to design a small actuator which generates large static displacement with low driving voltage. This paper deals with the typical structure of the actuator and mechanical characteristics of pseudo-static displacement.Keywords
This publication has 2 references indexed in Scilit:
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- A piezoelectrically operated optical chopper by quartz micromachiningJournal of Microelectromechanical Systems, 1995