Superlattice interface and lattice strain measurement by ion channeling
- 1 October 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 28 (7) , 4033-4036
- https://doi.org/10.1103/physrevb.28.4033
Abstract
The ion-beam channeling technique has been used to characterize the interface and the first few layers of [100] GaSb/AlSb superlattice structures. Strain caused by alternating tensile and compressive stress has been detected by measuring the oscillation of the [110]-aligned direction with depth. From the angular displacement and its oscillation, the amount of strain in the superlattice has been determined directly.Keywords
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