Fermi-level pinning at nickel disilicide–silicon interface
- 15 June 1989
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 39 (18) , 13323-13326
- https://doi.org/10.1103/physrevb.39.13323
Abstract
It has been found that the single-crystal Schottky-barrier height changes from 0.65 to 0.79 eV, depending upon the type-B film thickness on Si(111). In this study, the barrier height is calculated by an interface-defect model and compared with our experimental results. The calculated barrier height seems to give a good explanation of our experimental results.
Keywords
This publication has 16 references indexed in Scilit:
- Schottky barrier height of single-crystal nickel disilicide/silicon interfacesJournal of Applied Physics, 1988
- Schottky barriers of epitaxial NiSi2 on Si(111)Applied Physics Letters, 1988
- Schottky-barrier heights of single-crystalon Si(111): The effect of a surfacep-njunctionPhysical Review B, 1986
- Schottky barrier height measurements of epitaxial NiSi2 on SiApplied Physics Letters, 1985
- Correlation of Schottky-Barrier Height and Microstructure in the Epitaxial Ni Silicide on Si(111)Physical Review Letters, 1985
- Schottky-Barrier Formation at Single-Crystal Metal-Semiconductor InterfacesPhysical Review Letters, 1984
- Fermi-level position at a semiconductor-metal interfacePhysical Review B, 1983
- Pile up of implanted phosphorus during palladium silicide formation and the characteristics of Schottky barrier diodesJournal of Applied Physics, 1983
- Redistribution of implanted phosphorus after platinum silicide formation and the characteristics of Schottky barrier diodesJournal of Applied Physics, 1982
- Electron transport across aluminum/ultrathin silicon oxide/phosphorus implanted silicon barriersJournal of Applied Physics, 1980