Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding
- 15 May 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 67 (1-3) , 181-184
- https://doi.org/10.1016/s0924-4247(97)01739-1
Abstract
No abstract availableKeywords
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- Anodic bonding of imperfect surfacesJournal of Applied Physics, 1983