Laser–Assisted Mos/Sos Transistor Fabrication
- 1 January 1981
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- CW LASER ANNEALING OF ION-IMPLANTED POLYCRYSTALLINE SILICON FILMSPublished by Elsevier ,1980
- Laser annealing of m.o.s.-transistor channel implantationsElectronics Letters, 1979