A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes
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- 9 November 2001
- journal article
- review article
- Published by Elsevier
- Vol. 15 (2) , 65-75
- https://doi.org/10.1016/s0950-4230(01)00067-5
Abstract
No abstract availableKeywords
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