Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors
- 31 December 2002
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 34 (2) , 115-126
- https://doi.org/10.1016/s0026-2692(02)00153-2
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Silicon Planar Microcalorimeter Employing Nanostructured FilmsPublished by Springer Nature ,2001
- Optimization of an integrated SnO2 gas sensor using a FEM simulatorSensors and Actuators A: Physical, 1998
- An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate1Paper presented at the 2nd Asia Conference on Chemical Sensors, Xi'an, P.R. China, 1995.1Sensors and Actuators B: Chemical, 1998
- Thermal modelling and characterisation of micropower chemoresistive silicon sensorsSensors and Actuators B: Chemical, 1997
- A polysilicon flow sensor for gas flow metersSensors and Actuators A: Physical, 1996
- Liquid-crystalline phases as templates for the synthesis of mesoporous silicaNature, 1995
- The Si-Planar-Pellistor array, a detection unit for combustible gasesSensors and Actuators B: Chemical, 1993
- The Si planar pellistor: a low-power pellistor sensor in Si thin-film technologySensors and Actuators B: Chemical, 1991
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- Thermal management of integrated microsensorsSensors and Actuators, 1987