SURFACE STATES IN SILICON FROM CHARGES IN THE OXIDE COATING
- 1 February 1968
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 12 (3) , 95-97
- https://doi.org/10.1063/1.1651913
Abstract
The experimentally observed distributions of surface state density versus energy is correlated with the existence of coulombic centers in the oxide. Single charges give rise to peaks in surface state density close to the band edges, deeper levels are introduced by two charges in close proximity.Keywords
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