Effect of surface topography on scanning RBS microbeam measurements
- 1 July 1998
- Vol. 50 (3-4) , 503-506
- https://doi.org/10.1016/s0042-207x(98)00090-6
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Applications of nuclear microprobes to semiconductor process developmentsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Analytical techniques in nuclear microprobesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- The Nuclear MicroprobeAnnual Review of Nuclear and Particle Science, 1992
- The effects of surface topography in nuclear microprobe Rutherford backscattering analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Multidimensional ion microbeam analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Depth profiles and microtopologyNuclear Instruments and Methods in Physics Research, 1983
- R.B.S. Microscopic "Tomography"IEEE Transactions on Nuclear Science, 1983
- Effects of surface roughness on backscattering spectraNuclear Instruments and Methods, 1980
- Surface topology using rutherford backscatteringNuclear Instruments and Methods, 1980
- Backscattering measurements and surface roughnessNuclear Instruments and Methods, 1974