Formation of buried CoSi2 layers by ion implantation, studied by Mössbauer spectroscopy and rutherford backscattering spectroscopy

This publication has 8 references indexed in Scilit:

• Mössbauer spectroscopy study of epitaxial and buried CoSi layers
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
• Mössbauer spectroscopy and rutherford backscattering study of Co-Silicide surface layers on Si
  Hyperfine Interactions, 1988
• Synthesis of heteroepitaxial Si/CoSi2/Si structures by Co implantation into Si
  Applied Physics Letters, 1988
• Cobalt-silicide structures studied by Mössbauer spectroscopy
  Hyperfine Interactions, 1987
• Mesotaxy: Single-crystal growth of buried CoSi2 layers
  Applied Physics Letters, 1987
• Transistor action in Si/CoSi2/Si heterostructures
  Applied Physics Letters, 1985
• Algorithms for the rapid simulation of Rutherford backscattering spectra
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Epitaxial silicides
  Thin Solid Films, 1982