Hg1-xCdxTe characterization measurements: current practice and future needs
- 1 June 1993
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 8 (6S) , 753-776
- https://doi.org/10.1088/0268-1242/8/6s/001
Abstract
An extensive industrial survey of the importance and use of characterization measurements for HgCdTe materials, processes and devices has been completed. Seventy-two characterization/measurement techniques were considered and thirty-five responses were received. This information was sought for a study on materials characterization and measurement techniques of parameters and properties necessary to improve the manufacturing capabilities of HgCdTe infrared detectors. The nature of materials characterization is defined, and an overview is given of how it is related to improving IR detector manufacturing. Finally, the authors present a description of the characterization survey and a summary of the survey results. Major aspects of the results include: (1) ranking the 72 techniques by their importance and frequency of use, (2) listing the parameters or properties determined by each technique, (3) enumerating the most important properties that need to be measured, (4) indicating the key measurement techniques that most need to be developed, enhanced or improved, and (5) giving key overall comments.Keywords
This publication has 7 references indexed in Scilit:
- Overview of compositional measurement techniques for HgCdTe with emphasis on IR transmission, energy dispersive X-ray analysis and optical reflectanceSemiconductor Science and Technology, 1993
- Methods for magnetotransport characterization of IR detector materialsSemiconductor Science and Technology, 1993
- Variable-area diode data analysis of surface and bulk effects in MWIR HgCdTe/CdTe/sapphire photodetectorsSemiconductor Science and Technology, 1993
- Key issues in HgCdTe-based focal plane arrays: An industry perspectiveJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Mercury cadmium telluride material requirements for infrared systemsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- The Quiet Path to Technological PreeminenceScientific American, 1989
- Analysis technology for VLSI fabricationProceedings of the IEEE, 1987