In-Diffusion and Annealing of Copper in Germanium
- 1 July 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (7R) , 990
- https://doi.org/10.1143/jjap.21.990
Abstract
The in-diffusion and anealing of copper in germanium are examined experimentally over the temperature range 600 to 805°C, and using the experimental results, discussions are made as to whether the dissociative mechanism or the kick-out mechanism is at work in these processes. The experimental results support the theory that copper in germanium diffuses by the dissociative mechanism and the dominant point defects in germanium are vacancies.Keywords
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