Characterization of sputtered yttria-stabilized zirconia thin film and its application to a metal-insulator-semiconductor structure
- 1 March 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 71 (5) , 2309-2314
- https://doi.org/10.1063/1.351103
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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