Pulsed excimer laser deposition Y1Ba2Cu3O7−x superconductor films on silicon with laser-deposited Y-ZrO2 buffer layer
- 22 October 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (17) , 1805-1807
- https://doi.org/10.1063/1.104142
Abstract
The pulsed excimer laser ablation method is used to deposit both the buffer layer of Y-stabilized ZrO2 and the overlayer of Y1Ba2Cu3O7−x superconductor on (100) oriented single-crystal silicon. Process parameter optimization study is carried out and it is shown that a thin film of the superconductor (0.5–0.7 μm) having a zero resistance temperature of 86 K can be obtained using a 0.3 μm buffer layer deposited at substrate temperatures between 600 and 800 °C.Keywords
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