The Fracture Toughness of Polysilicon Microdevices
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Ammonium Fluoride Anti-stiction Treatments For Polysilicon MicrostructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Mechanical properties of thick, surface micromachined polysilicon filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Materials reliability in MEMS devicesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Reliability considerations for electrostatic polysilicon actuators using as an example the REMO componentSensors and Actuators A: Physical, 1997
- The Fracture Toughness of Polysilicon Microdevices: A First ReportJournal of Materials Research, 1997
- Fracture Tests Of Polysilicon FilmMRS Proceedings, 1997