RuO2 Bottom Electrodes for Ferroelectric (Pb, La)(Zr, Ti)O3 Thin Films by Metalorganic Chemical Vapor Deposition
- 1 August 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (8R)
- https://doi.org/10.1143/jjap.34.4104
Abstract
No abstract availableKeywords
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