Dissolution Behavior of Novolak/Dissolution Inhibitor Resist Systems in an Aqueous Base Developer

Publisher Website
Google Scholar
Abstract
In order to understand the basic mechanisms working in the dissolution of novolak/dissolution inhibitor systems model compounds have been studied in terms of their dissolution inhibition capabilities. The influences of the structure of small size molecules on the inhibition effect were examined as well as the effects of the intramolecular composition and of the molecular weight of polymeric dissolution inhibitors. The role of the novolak type in the inhibition mechanism was also investigated. It was found that an amphiphilic character of the inhibitor molecule and an appropriate structure of the novolak matrix polymer are the most important features for systems with high dissolution inhibition capability. The intramolecular composition of polymeric dissolution inhibitors also has a strong effect, whereas the molecular weight of polymeric dissolution inhibitors has less influence.