Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography
- 11 March 2013
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 102 (10) , 101108
- https://doi.org/10.1063/1.4795308
Abstract
For ultralow-loss and polarization-insensitive spot-size converters (SSCs) on a silicon platform, we propose and demonstrate a silicon knife-edge taper waveguide with a gradual decrease in height as well as width toward the taper end. The taper was fabricated using a double-patterning method involving i-line stepper photolithography and angled sidewall dry-etching. The SSC, with the knife-edge taper covered with a polymer secondary core, exhibited mode conversion losses of 0.35 and 0.21 dB for transverse electric-like and transverse magnetic-like modes, respectively.Keywords
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