How is the chemical bonding of W–Si–N sputtered coatings?
- 1 July 2001
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 142-144, 964-970
- https://doi.org/10.1016/s0257-8972(01)01215-4
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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