Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films
- 1 November 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 120-121, 158-165
- https://doi.org/10.1016/s0257-8972(99)00481-8
Abstract
No abstract availableKeywords
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