InP-based MOEMS and related topics
- 23 May 2000
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 10 (2) , 287-292
- https://doi.org/10.1088/0960-1317/10/2/331
Abstract
Potential applications of InP and related compound semiconductors for the realization of micro-opto-electro-mechanical systems are presented. Specific features and advantages of InP and related material based micromachining show that the optical capabilities of InP-air based microcavities can be considerably enhanced.Keywords
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