An NBS standard reference material for depth profile analysis
- 1 July 1988
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 11 (10) , 542-543
- https://doi.org/10.1002/sia.740111010
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Sputter deposition of multilayered structures for use in sputter depth profile calibrationVacuum, 1986
- Interface depth resolution of Auger sputter profiled Ni/Cr interfaces: Dependence on ion bombardment parametersJournal of Vacuum Science & Technology A, 1985
- Characterization of NBS Standard Reference Material 2135 for sputter depth profile analysisJournal of Vacuum Science & Technology A, 1985
- AES and XPS depth profiling certified reference materialSurface and Interface Analysis, 1984
- Rutherford backscattering analysis of multilayered CrNi structures to be used for sputtering standardsNuclear Instruments and Methods in Physics Research, 1983