Polymers as masks for Ion implantation
- 1 January 1987
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 16 (1) , 33-38
- https://doi.org/10.1007/bf02667788
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- An analytical model for the narrow-width effect in ion-implanted MOSFETsSolid-State Electronics, 1984
- Positive Photoresists As Ion Implantation MasksPublished by SPIE-Intl Soc Optical Eng ,1979
- Range and straggle of boron in photoresistSolid-State Electronics, 1972
- Isolation of junction devices in GaAs using proton bombardmentSolid-State Electronics, 1969