Microstructural changes in vapour-deposited silver, copper and gold films investigated by internal stress measurements
- 1 July 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 140 (2) , 217-226
- https://doi.org/10.1016/0040-6090(86)90265-8
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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