Structure analysis of teflon-like thin films synthesized by ion beam sputtering deposition
- 1 November 1997
- journal article
- Published by Elsevier in Materials Letters
- Vol. 33 (1-2) , 77-78
- https://doi.org/10.1016/s0167-577x(97)00074-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Organic gas sorption by chemical-sensing fluoropolymer films prepared by radio-frequency sputteringThin Solid Films, 1994
- Ion-beam sputtering deposition of fluoropolymer thin filmsApplied Physics Letters, 1993
- Structural investigation of diamond thin films synthesized by dual ion beam depositionVacuum, 1992