Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2+ and Cl+ densities
- 1 September 2000
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 88 (5) , 2246-2251
- https://doi.org/10.1063/1.1288156
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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