Phenomenological model for gas-damping of micromechanical structures
- 8 January 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 72 (1) , 49-70
- https://doi.org/10.1016/s0924-4247(98)00203-9
Abstract
No abstract availableKeywords
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