Nanometer-scale force sensing with MEMS devices

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Abstract
In recent years, many researchers have adapted lithography, deposition, and etching techniques from the IC processing community for the fabrication of micromechanical sensors. Many of the signals that these sensors are intended to detect are expressed as forces which stress or deflect the micromechanical structure. As sensors are miniaturized, these forces naturally become smaller, and techniques for detection are required to improve. Many researchers have been engaged in extending MEMS force sensing to the nanometer scale by incorporating new materials and fabrication approaches. This paper will discuss the issues and limitations related to sensing on the nanometer scale and review recent work in this field.

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