Application of the dual‐beam FIB/SEM to metals research
- 21 May 2004
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 214 (3) , 237-245
- https://doi.org/10.1111/j.0022-2720.2004.01329.x
Abstract
The dual‐beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy‐dispersive X‐ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross‐sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a grain boundary in a Cu3Au alloy. In both cases, the dual beam succeeded where other methods failed.Keywords
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