Structural analysis of TiNx films prepared by reactive-ion-beam-enhanced deposition
- 1 April 1990
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine Part B
- Vol. 61 (4) , 627-637
- https://doi.org/10.1080/13642819008219298
Abstract
TiNx films have been prepared using reactive-ion-beam-assisted deposition, a hybrid technique employing evaporation and ion implantation in sequential steps. TiNx films with the calculated N/Ti ratios varying from 0·32 to 1·5 were prepared on type 304 stainless steel substrates. Microhardness, X-ray diffraction and scanning electron microscopy measurements were carried out on these specimens. X-ray profile analysis was carried out to obtain crystallite sizes and residual stresses present in the specimens. The orientation factor was calculated to determine the texture of the film. Abrupt changes in the strain, size and orientation parameters were observed for the near-stoichiometric films. In general the films were defect-rich and of fine grain size. The films having a low concentration of N were oriented in the [111] direction. The microhardness was found to be higher than the bulk value and a maximum for the near-stoichiometric composition.Keywords
This publication has 14 references indexed in Scilit:
- Fundamental study of TiN films deposited by ion beam mixingMaterials Science and Engineering: A, 1989
- A profile-fitting procedure for analysis of broadened X-ray diffraction peaks. I. MethodologyJournal of Applied Crystallography, 1988
- Inhibition of tribo-oxidation preceding wear, by single-phased TiNx films formed by ion implantation into TiAl6V4Journal of Materials Research, 1987
- Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced depositionMaterials Science and Engineering, 1987
- An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- The occurrence of strain in amorphization studies by ion implantation: Boron into niobium and molybdenum filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Material selection for hard coatingsJournal of Vacuum Science & Technology A, 1986
- Adherent TiN films produced by ion beam enhanced deposition at room temperatureNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Single-peak methods for Fourier analysis of peak shapesJournal of Applied Crystallography, 1984
- Surface stresses in ion−implanted steelJournal of Vacuum Science and Technology, 1975