An investigation into the variation in bombardment intensity from ion plating discharges by sputter weight loss experiments
- 31 December 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 193-194, 171-180
- https://doi.org/10.1016/s0040-6090(05)80025-2
Abstract
No abstract availableKeywords
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