Some fundamental aspects of glow discharges in plasma-assisted processes
- 31 December 1987
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 33, 17-29
- https://doi.org/10.1016/0257-8972(87)90173-3
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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