Ion energy distribution in triode ion plating
- 1 August 1984
- Vol. 34 (8-9) , 765-769
- https://doi.org/10.1016/0042-207x(84)90325-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Ion energy distribution in ion platingVacuum, 1983
- Characteristics of a thermionically assisted triode ion-plating systemThin Solid Films, 1981
- Simple parallel plate energy analyser for measuring the energy distribution of metal vapours in a dischargeJournal of Physics E: Scientific Instruments, 1980
- The energies of ions and neutrals in ion platingJournal of Physics D: Applied Physics, 1976
- Thin film formation of In2O3, TiN, and TaN by rf reactive ion platingJournal of Vacuum Science and Technology, 1975