An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 12 (9) , 1345-1356
- https://doi.org/10.1109/43.240082
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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