Substrate heating in cylindrical magnetron sputtering sources
- 1 October 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 54 (1) , 23-31
- https://doi.org/10.1016/0040-6090(78)90273-0
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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