X-ray measurement of elastic strain and lattice constant of diffused silicon
- 31 January 1967
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 10 (1) , 33-37
- https://doi.org/10.1016/0038-1101(67)90110-4
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- X-ray investigation of the perfection of siliconActa Metallurgica, 1962
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962
- Generation and Distribution of Dislocations by Solute DiffusionJournal of Applied Physics, 1961
- Slip Patterns on Boron-Doped Silicon SurfacesJournal of Applied Physics, 1961
- Densitometric and Electrical Investigation of Boron in SiliconPhysical Review B, 1955
- Electrical Properties of Pure Silicon and Silicon Alloys Containing Boron and PhosphorusPhysical Review B, 1949