A study of the initial stages of the oxidation of silicon using 18O2 and RTP
- 1 March 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 65-66, 647-653
- https://doi.org/10.1016/0169-4332(93)90734-s
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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