Room-temperature r.f. magnetron sputtered ZnO for electromechanical devices
- 30 March 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (3) , 229-235
- https://doi.org/10.1016/s0924-4247(96)01430-6
Abstract
No abstract availableKeywords
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