ZnO films deposited on GaAs substrates with a SiO2 thin buffer layer
- 1 March 1993
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 22 (3) , 267-273
- https://doi.org/10.1007/bf02661376
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Structural and Electrical Properties of ZnO Films Deposited on GaAs Substrates by RF Magnetron SputteringMRS Proceedings, 1991
- Defect clusters in zinc oxideJournal of Applied Physics, 1990
- Survey of Semiconductor PhysicsPublished by Springer Nature ,1990
- LOW-ENERGY ION/SURFACE INTERACTIONS DURING FILM GROWTH FROM THE VAPOR PHASEPublished by Elsevier ,1989
- Zinc Oxide Films for Acoustoelectric Device ApplicationsIEEE Transactions on Sonics and Ultrasonics, 1985
- Position and pressure effects in rf magnetron reactive sputter deposition of piezoelectric zinc oxideJournal of Applied Physics, 1984
- Surface acoustic wave resonators on a ZnO-on-Si layered mediumJournal of Applied Physics, 1983
- Reactive magnetron sputtering of ZnOJournal of Applied Physics, 1981
- Acoustic readout of charge storage on GaAsApplied Physics Letters, 1974