Abstract
An on-wafer calibration verification technique is presented. The approach involves comparing thru-reflect-line (TRL) calibrated microstrip measurements with independent resonator measurements in the 1.0- to 26.5-GHz band. This is believed to be the first reported independent verification of any microstrip on-wafer calibration. The improved accuracy using a verified on-wafer microstrip TRL calibration is demonstrated to improve the ability to attain first-iteration MMIC (monolithic microwave integrated circuit) design success.

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