High accuracy quartz crystal thin film monitor
- 1 July 1979
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 50 (7) , 867-871
- https://doi.org/10.1063/1.1135941
Abstract
A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100‐nm‐thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described.Keywords
This publication has 3 references indexed in Scilit:
- A digital quartz deposition monitor using a microprocessorThin Solid Films, 1976
- Progress in monitoring thin film thickness with quartz crystal resonatorsThin Solid Films, 1976
- Long-Term Operation of Crystal Oscillators in Thin-Film DepositionJournal of Vacuum Science and Technology, 1971