Progress in monitoring thin film thickness with quartz crystal resonators
- 1 February 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 32 (1) , 27-33
- https://doi.org/10.1016/0040-6090(76)90547-2
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- A digital quartz deposition monitor using a microprocessorThin Solid Films, 1976
- Linearity of a Heavily Loaded Quartz Crystal MicrobalanceJournal of Vacuum Science and Technology, 1973
- Investigation of film-thickness determination by oscillating quartz resonators with large mass loadJournal of Applied Physics, 1972
- Simultaneous Thin-Film Stress and Mass-Change Measurements Using Quartz ResonatorsJournal of Applied Physics, 1972
- Observations on a quartz crystal deposition monitorJournal of Physics E: Scientific Instruments, 1971
- Long-Term Operation of Crystal Oscillators in Thin-Film DepositionJournal of Vacuum Science and Technology, 1971
- Acoustic Wave Analysis of the Operation of Quartz-Crystal Film-Thickness MonitorsJournal of Applied Physics, 1968
- Factors influencing the accuracy of a quartz-crystal-oscillator as a thickness monitor for thin film depositionThin Solid Films, 1968
- Resonance Frequency Versus Mass Added to Quartz CrystalsPublished by Springer Nature ,1966
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959