Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates
- 1 January 1999
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 9 (2) , 135-138
- https://doi.org/10.1088/0960-1317/9/2/008
Abstract
No abstract availableKeywords
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