Ion-etch characteristics of epitaxial copper on sapphire
- 1 September 1970
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 5 (9) , 736-740
- https://doi.org/10.1007/bf00562158
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- ERRATA: Epitaxy of Copper on SapphireApplied Physics Letters, 1969
- THE EPITAXY OF COPPER ON SAPPHIREApplied Physics Letters, 1968
- X-ray measurement of elastic strain and lattice constant of diffused siliconSolid-State Electronics, 1967
- Sputtering Experiments with 1- to 5-keV Ar+ IonsJournal of Applied Physics, 1963
- Sputtering of Metal Single Crystals by Ion BombardmentJournal of Applied Physics, 1955