In situ preparation of superconducting Y1Ba2Cu3O7−δ thin films by on-axis rf magnetron sputtering from a stoichiometric target
- 6 May 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (18) , 2036-2038
- https://doi.org/10.1063/1.105005
Abstract
Superconducting Y1Ba2Cu3O7−δ thin films have been fabricated in situ by on‐axis rf reactive magnetron sputtering from a single stoichiometric 1‐2‐3 target. By using high total sputtering pressures (≳400 mTorr) and low oxygen pressures (≤10 mTorr), negative ion resputtering is almost eliminated and high quality oriented films on (100)MgO are realized with excellent reproducibility. Such films display zero resistance Tc’s as high as 88 K with transition widths ΔTc (90%–10%) of about 2 K, residual resistivity ratios R(300 K)/R(100 K) of 2.5, and critical current densities greater than 106 A/cm2 at 14 K.Keywords
This publication has 13 references indexed in Scilit:
- Epitaxial Y-Ba-Cu-O thin films on MgO deposited by high-pressure reactive magnetron sputteringJournal of Applied Physics, 1989
- I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputteringApplied Physics Letters, 1989
- In situ thin films of YBa2Cu3O7 prepared by single target DC-magnetron sputteringPhysica C: Superconductivity and its Applications, 1989
- I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputteringApplied Physics Letters, 1988
- Low-temperature preparation of high T c superconducting thin filmsApplied Physics Letters, 1988
- Negative ion effects during magnetron and ion beam sputtering of YBa2Cu3OxAIP Conference Proceedings, 1988
- High Tc YBa2Cu3O7−x superconducting thin films by rf magnetron sputteringAIP Conference Proceedings, 1988
- Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codepositionJournal of Materials Research, 1987
- Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−xApplied Physics Letters, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987