Growth of InGaAsP by molecular beam epitaxy

Abstract
Molecular beam epitaxy has been used to grow good quality films of InGaAsP on InP substrates. The films have been characterized using infrared absorption, electroreflectance, x‐ray diffraction, reflection electron diffraction, and Hall measurements. Lattice matching was achieved and room‐temperature mobilities up to 4600 cm2 V1 s1 were measured.