Ion beam induced chemical changes in molecular solids
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 270-274
- https://doi.org/10.1016/0168-583x(89)90184-5
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Molecular weight distribution and solubility changes in ion-bombarded polystyreneNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Decomposition of palladium acetate films with a microfocused ion beamApplied Physics Letters, 1986
- Inorganic ion beam resist for additive plating of metallic interconnectsApplied Physics Letters, 1985
- Ion beam exposure characteristics of resistsJournal of Vacuum Science and Technology, 1979