Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials
- 1 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (1) , 37-46
- https://doi.org/10.1016/0924-4247(95)00849-7
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow metersSensors and Actuators A: Physical, 1994
- Surface micromachined pressure transducersSensors and Actuators A: Physical, 1991
- A New Technique for Determination of Tensile Stress in Thin FilmsJournal of the Electrochemical Society, 1989
- On the use of orthogonal polynomials in the Rayleigh-Ritz method for the study of the flexural vibration and buckling of isotropic and orthotropic rectangular platesJournal of Sound and Vibration, 1986
- Natural frequencies of rectangular plates using characteristic orthogonal polynomials in rayleigh-ritz methodJournal of Sound and Vibration, 1985
- The influence of tensile forces on the deflection of circular diaphragms in pressure sensorsSensors and Actuators, 1984
- Das Verfahren von Rayleigh‐Ritz mit hermiteschen InterpolationspolynomenZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik, 1963